Comparison between Vacuum Evaporation Coating, Vacuum Sputtering Coating and Vacuum Ion Coating

 

Item Compared Vacuum Evaporation Coating Vacuum Sputtering Coating Vacuum Ion Coating(PVD Coating) Pressure (Torr) 10 -5 -10 -6 0.15-0.02 0.02-0.005 Energy of Particle Neuter 0.1-1eV 1-10eV 0.1-1eV Ion － － Hundreds to Thousands Deposition Rate ( μm /min) 0.1-70 0.01-0.5 0.1-50 Turn around property not good good better Adherence power not good good better Compactness of coatings low density high density high density Air hole in the coating more less less Internal Stress tensile stress compressive stress compressive stress